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普達特科技(00650.HK)附屬芯愷半導體設備(徐州)獲兩台半導體低壓化學氣相沉積設備樣機訂單
格隆匯 05-13 21:52

格隆匯5月13日丨普達特科技(00650.HK)公吿,公司控股69.2%的附屬公司芯愷半導體設備(徐州)有限責任公司,已從一個客户處獲得兩台半導體低壓化學氣相沉積("LPCVD")設備樣機訂單。該等樣機訂單的收入暫未確認。據董事經作出一切合理查詢後所深知、盡悉及確信,於本公吿日期,該客户及其最終實益擁有人為獨立於公司及其關連人士的第三方。

該等設備為用於12寸半導體晶圓製造的爐管LPCVD設備,分別針對LP-SiN與ALD-SiN兩類關鍵的薄膜沉積工藝,已經歷前期的測試驗證,將分別於2025年5月十九日與2025年6月25日交付至客户的晶圓廠。相比國產的同類設備,該等設備在技術上可實現更高的填充深寬比、均勻性、台階覆蓋率與更低的污染,此外該等設備擁有更高的批次生產效率,且具備多種工藝選擇的兼容性。相比海外供應商的同類設備,該等設備具有同等水平的技術性能與更優的性價比,可為客户提供更具綜合競爭力的解決方案。

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