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珂瑪科技(301611.SZ):目前12寸靜電卡盤正處於客戶驗證階段
格隆匯 03-03 09:20

格隆匯3月3日丨珂瑪科技(301611.SZ)接受特定對象調研時表示,陶瓷加熱器主要應用於薄膜沉積設備,由於涉及到高溫製程,採用的陶瓷材料主要爲氮化鋁;靜電卡盤主要應用於刻蝕設備,採用的陶瓷材料主要爲氧化鋁。隨着半導體工藝的發展,陶瓷加熱器與靜電卡盤的區分開始模糊,比如公司生產的應用於薄膜沉積設備的某款陶瓷加熱器就也可以作爲靜電卡盤使用,同時具備高溫加熱和靜電吸附雙重功能,此類產品在客戶端就稱之爲靜電卡盤,而用於刻蝕設備的靜電卡盤也開始涉及高溫製程,故陶瓷材料就需要從氧化鋁切換爲氮化鋁。除少數工藝環節外,陶瓷加熱器與靜電卡盤的產線是無法共用的,氧化鋁和氮化鋁兩種陶瓷材料需要隔離,否則會影響產品純淨度,且加工工藝流程也有較大差異。目前公司具備完整的陶瓷加熱器產線,正在逐步提高產能中,公司也擁有獨立產線生產靜電卡盤,目前12寸靜電卡盤正處於客戶驗證階段。

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