至純科技(603690.SH):公司可滿足28nm全部濕法工藝需求 且全工藝機台均有訂單
格隆匯6月6日丨至純科技(603690.SH)近期接受特定對象調研時表示,公司可滿足28nm全部濕法工藝需求,且全工藝機台均有訂單。公司濕法設備聚焦芯片製造的前道工藝,高端產品包括SPM高温硫酸、去膠、晶背清洗等設備。其中單片SPM工藝應用貫穿整個先進半導體的前、中段工藝,是所有濕法工藝中應用最多的一種設備,SPM工藝被公認是28/14nm性能要求最高的工藝,也是最具挑戰的濕法工藝設備。在至純科技的單片SPM獲得突破之前,所有的單片SPM設備全部由國外廠商所壟斷。公司在核心工序段的高階設備累計訂單量近20台。公司依靠專業度高、技術能力強的核心人才隊伍,率先突破14nm及以下製程的濕法設備的研發,進一步提高行業壁壘,奠定國內專業濕法設備供應商的領先地位。14nm及以下也有4台訂單交付。
其進一步表示,受2022年下半年以來美國製裁影響,晶圓廠投產節奏放緩,公司半導體清洗設備受到一定影響,2023年一季度設備新接訂單相比去年有一定下降,但從一季度的行業情況來看,部分客户已重新啟動,在進行設備的技術交流與商務洽談中,訂單落地情況請關注今年二三季度。
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