英諾激光(301021.SZ):公司的XBC激光圖形化設備採用自主研發的激光器,使用雙軌鏡像結構
格隆匯7月8日丨英諾激光(301021.SZ)在互動平台表示,公司的XBC激光圖形化設備採用自主研發的激光器,使用雙軌鏡像結構,雙軌各配置兩套獨立的激光加工系統,具備較高的產能與生產靈活性。主要用於刻蝕掩膜、製備PN區交叉指結構、PN區隔離及鈍化膜開槽。目前該設備已在客户處量產驗證。
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