拓荊科技(688072.SH):PECVD設備是公司的核心產品
格隆匯7月25日丨拓荊科技(688072.SH)近期在接待機構投資者調研時表示,PECVD設備是公司的核心產品,公司自成立就開始研製 PECVD設備,在PECVD設備技術領域具有十餘年的研發和產業化經驗,並形成了覆蓋全系列 PECVD 薄膜材料的設備,已在集成電路領域廣泛應用;公司研製的ALD設備系列產品包括PE-ALD設備和Thermal-ALD設備,PE-ALD設備已實現量產,可以沉積SiO2、SiN等介質薄膜材料,Thermal-ALD設備已出貨至不同客户端進行驗證,可以沉積Al2O3等金屬化合物薄膜,同時,公司持續拓展ALD設備薄膜種類及工藝應用;SACVD和HDPCVD設備均已實現產業化,正在持續提升量產應用規模。
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