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炬光科技(688167.SH):公司的光場勻化器產品供應給國內主要光刻機制造商
格隆匯 07-17 19:10

格隆匯7月17日丨有投資者向炬光科技(688167.SH)提問,“公司與國內哪些研究院有研發合作光刻機?當前研發出的樣機能開展14nm、28nm和8nm的芯片燒蝕嗎?荷蘭阿斯麥禁售高端光刻領域產品和技術,作為阿斯麥的間接供應商,炬光科技將有哪些動作,支持國家集成電路產業的發展,實現高精尖設備的自主可控?”

炬光科技回覆稱,公司的光場勻化器產品供應給國內主要光刻機制造商,產品已應用於國內主要光刻機研發項目和樣機中。具體客户情況請以公司公開披露的信息為準。在半導體集成電路領域,公司已經有多項產品和技術服務於國內集成電路設備商,包括用於28nm製程及以下邏輯芯片的激光退火系統、用於DUV光刻機的光場勻化器、用於後道封裝製程領域的激光輔助鍵合激光系統等。

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