晶盛機電(300316.SZ):8英寸碳化硅晶圓的邊緣損耗更小、可利用面積更大,未來通過產量和規模效益的提升,成本有望降低60%以上
格隆匯7月12日丨晶盛機電(300316.SZ)於2023年7月11日-12日接受機構調研,交流環節中,就“請公司簡要介紹新產品8英寸碳化硅外延設備性能及其優勢”
公司回覆稱,公司成功研發出具有國際先進水平的8英寸單片式碳化硅外延生長設備,引領國內碳化硅行業技術升級。目前公司在8英寸襯底基礎上,已實現8英寸單片式碳化硅外延生長設備的自主研發與調試,外延的厚度均勻性1.5%以內、摻雜均勻性4%以內,已達到行業領先水平,這是公司在第三代半導體設備領域的又一次重要技術突破。
8英寸碳化硅晶圓的邊緣損耗更小、可利用面積更大,未來通過產量和規模效益的提升,成本有望降低60%以上。公司的8英寸單片式碳化硅外延生長設備,可為行業提供更為先進的技術支持,推動碳化硅行業的快速發展。
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