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盛美上海(688082.SH):熱反應的ALD爐管首台去年已進入客户端,目前結果不錯;Track設備已在客户端與光刻機進行對接等等
格隆匯 06-02 18:48

格隆匯6月2日丨盛美上海(688082.SH)於2023年5月參與分析師會議或公開的電話會議,問答環節中,就“公司熱反應的ALD爐管,以及公司新推出的PECVD還有超臨界清洗設備的情況備受市場關注,請問ALD和超臨界二氧化碳清洗的最新進展如何?”,公司回覆稱,公司熱反應的ALD爐管首台去年已經進入客户端,目前結果不錯,各項技術數據均達到設計要求,並且能夠非常接近甚至部分超過國際大廠的數據指標。總體來説,客户端對公司熱反應的ALD產品性能比較滿意。

CO2超臨界清洗設備整體進展較為順利,該設備公司具有獨立IP,產品優點在於能極大節省CO2原料,預估節省量在40%以上。

Track設備已經在客户端與光刻機進行對接,公司希望年底左右能完成基本的工藝包括可靠性驗證。

PECVD設備經過近期幾個月的大量測試,結果令人滿意,公司將繼續和客户端進行緊密溝通,並且希望今年能夠在兩到三家客户處進行驗證環節。

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