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銘普光磁(002902.SZ):一種晶圓減薄方法取得發明專利證書
格隆匯 04-07 18:16

格隆匯4月7日丨銘普光磁(002902.SZ)公佈,公司及全資子公司東莞安晟半導體技術有限公司於近日取得一項中華人民共和國國家知識產權局頒發的發明專利證書,發明名稱:一種晶圓減薄方法,專利號:ZL 2021 1 0645550.9。

本發明涉及晶圓處理技術領域,具體涉及一種晶圓減薄方法,取一襯底進行預處理;在待處理的晶圓表面覆上膠體層,測量膠體層的厚度,控制膠體層的厚度在預定範圍內;將晶圓粘接在襯底上並對晶圓進行減薄處理,待減薄處理完成後使晶圓和襯底進行分離。

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