芯源微(688037.SH):將於12月17日召開浸沒式高產能塗膠顯影機新品發佈會
格隆匯12月15日丨芯源微(688037.SH)公佈,在瀋陽芯源微電子設備股份有限公司成立滿二十週年之際,公司定於2022年12月17日上午10:30召開浸沒式高產能塗膠顯影機新品發佈會,屆時將通過上證報路演平台對全市場發佈。
召開時間為2022年12月17日上午10:30;召開方式為上證報路演平台(https://roadshow.cnstock.com/)在線發佈。
此次發佈的產品為公司最新的前道浸沒式高產能塗膠顯影機。該機型採用公司獨創的對稱分佈高產能架構,滿配36Spin處理單元,搭載公司自主研發的雙向同步取放機械手,可大幅提升整機的機械傳送產能和傳送精度,能夠匹配全球主流光刻機聯機生產。該款機型通過選配可全面覆蓋I-line、KrF、ArFdry、ArF浸沒式等多種光刻技術,也適用包括SOC、SOH、SOD等在內的其他旋塗類應用。
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