鼎龍股份(300054.SZ):拋光液產品通過客户端驗證並開啟計劃採購
格隆匯3月10日丨鼎龍股份(300054.SZ)公佈,公司近年一直圍繞集成電路核心CMP全局平坦化工藝材料作為發展重點和延展方向,依靠公司在化學材料領域和工程化領域二十年的技術積累,公司控股子公司武漢鼎澤新材料技術有限公司的氧化鋁拋光液產品在某家公司28nm節點HKMG工藝的AlCMP製程驗證通過。
該產品使用氧化鋁研磨粒子和高分子聚合物,是所有拋光液中技術最難的關鍵材料,公司已突破技術難關,實現三種關鍵材料的自主製備。該款搭載公司自制研磨粒子的拋光液產品,是目前尚未取得國產化材料突破的卡脖子拋光液型號之一,難度極高,其各項參數均達到客户應用要求,通過客户端全方面工藝參數驗證,並已進入噸級採購階段。
拋光液是集成電路製造中晶圓平坦化工藝的重要材料,其組分包含研磨粒子與化學成分,因而對其性質的控制,是決定化學機械平坦化製程中化學能力與機械作用的關鍵。從硅晶圓製造,到集成電路器件構建,再到芯片封裝環節,拋光液被認為是貫穿於芯片“從砂到芯”的全流程材料。其中,研磨粒子是拋光液的核心,是世界公認的“技術護城河”。目前公司研磨粒子已實現“卡脖子”關鍵核心技術重大突破,可以滿足客户定製化需求。
目前,公司各製程拋光液在中國各個主流廠商的驗證評價和市場推廣工作已全面展開,部分客户的初步評價已經獲得了客户端極好的評價結果。產能建設方面,武漢本部工廠一期全自動化拋光液生產車間已經建成,具備年產5000噸拋光液的生產能力,能夠滿足客户端訂單需求。公司將根據市場情況儘快研究部署二期產能建設。
公司強調,該項目是公司CMP全局平坦化綜合解決方案的重要組成部分,也將形成公司新的新產品增長級。
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