上海新陽(300236.SZ)：子公司芯刻微購得一台ASML XT 1900 Gi型二手光刻機
格隆匯 3 月 11日丨上海新陽(300236.SZ)公佈，2020年8月13日公司第四屆第十四次會議審議通過《關於轉讓全資子公司上海芯刻微材料技術有限責任公司股權暨關聯交易的議案》，公司與上海芯刻微材料技術有限責任公司(“芯刻微”)、上海超成材料科技有限公司(“超成科技”)簽署了《增資及股權轉讓協議》。增資及股權轉讓完成後，公司持有芯刻微38%的股權，超成科技持有芯刻微62%的股權，芯刻微公司未來進行ArF濕法光刻膠的研發。
集成電路製造用ArF濕法光刻膠產品技術要求高、投資需求大，公司為加速集成電路製造用高端光刻膠全品類的國產化進程，減少上市公司業績壓力，通過參股子公司芯刻微進行ArF濕法光刻膠的研發，並與協議各方承諾未來通過向上市公司進行股權轉讓或技術轉讓等方式避免可能的同業競爭。
近日，由芯刻微公司委託盛吉盛(寧波)半導體材料有限公司(“盛吉盛”)代理投標，成功中標，購得ASML XT 1900 Gi型二手光刻機一台，該設備可用於研發分辨率達28nm的高端光刻膠。3月11日，芯刻微公司向盛吉盛支付10%首期貨款購入該光刻機，剩餘90%六個月內付清。後續公司將啟動設備的運輸及相關安裝調試等工作。
公司作為國內集成電路製造關鍵工藝材料供應商，自立項進行光刻膠項目研發以來，將突破集成電路高端光刻膠國外壟斷，實現集成電路高端光刻膠材料的國產化作為發展目標，在 ArF幹法、KrF厚膜及I線光刻膠方面已有技術與產品的突破。通過子公司芯刻微開展的ArF濕法光刻膠項目研發也已引進了核心技術專家團隊，為ArF濕法光刻膠項目的開發提供了技術保障，現公司採購的ASML浸沒式光刻機設備是對公司ArF濕法光刻膠技術先進性的設備保障，對加快公司集成電路製造用光刻膠產品研發項目進度有積極影響，有利於進一步提升公司光刻膠產品的核心競爭力，加速落實公司發展戰略，提高公司抗風險能力和可持續發展能力。
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