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中芯國際迎來久違的好消息:訂購12億美元光刻機!
格隆匯 03-04 06:36

中芯國際迎來了久違的好消息:可從阿斯麥(ASML)訂購12億美元的光刻機。

訂購12億美元光刻機

3月3日晚間,中芯國際披露,公司於2月1日與阿斯麥(ASML)上海簽訂了經修訂和重述的阿斯麥批量採購協議,將採購協議的期限延長一年至2021年12月31日。根據批量採購協議,公司已就購買用於生產晶圓的阿斯麥產品(即光刻機)與阿斯麥集團簽訂購買單,訂單金額12億美元。

阿斯麥(ASML)即荷蘭阿斯麥,是全球最大的半導體設備製造商之一,主要業務為光刻機的研發和生產,在全球處於絕對領先地位。具體來看,ASML在45nm以下製程的高端光刻機市場中佔有85%的份額;在EUV(極紫外)光刻機領域則處於絕對壟斷地位,市場佔有率100%。

目前,ASML的EUV光刻機主力出貨型號是3400B,價格約1.2億美元,其最新款的3600D定於2021年中旬出貨交付。

是否包含EUV光刻機?

眾所周知,EUV光刻機是生產5nm芯片必不可缺的設備。那麼,中芯國際此次12億美元的採購協議都有哪些類型的光刻機,包含EUV光刻機嗎?

記者從業內資深人士處瞭解到,除了EUV光刻機,中芯國際幾乎可以買到其他所有型號的光刻機,包括DUV(深紫外)光刻機。

此前,ASML的CFO在財報會議的視頻採訪中表示:如果寬泛地理解相關規則對AMSL的整體意義,ASML將能夠從荷蘭向中國客户(包括中芯國際)提供DUV光刻系統,且無需出口許可證。不過,如果涉及直接從美國運往此類客户的零件或系統,ASML則需要為此申請出口許可證。

在DUV光刻機方面,ASML的最新一代產品型號是NXT 2050i。公開資料顯示,ASML於2020年第三季度對第一台TWINSCAN NXT 2050i進行了質量認證,並於第四季度初發貨。由於對掩模版工作台、晶圓工作台、投影物鏡和曝光激光器的技術改進,NXT2050i提供了比其前身更好的套刻精度控制,具有更高的生產率。

公開報道顯示,ASML的上一代DUV產品NXT2000i光刻機,光刻精度可以達到1.9nm,遠高於5nm要求的2.4nm以及7nm的3.5nm精度。

第一季度營收預計超10億美元

在近期接受機構調研時,中芯國際聯合首席執行官趙海軍表示,目前公司依然是滿載運營,預計今年第一季度營收會回到10億美元以上。

此前,中芯國際預計,2021年全年營收成長在中到高個位數。

產能緊缺已經成為半導體業內共識。趙海軍表示,公司會繼續擴產,預計12英寸月產能增加1萬片, 8英寸月產能增加不少於4.5萬片,但由於設備採購週期長,預計擴產產能對今年營收貢獻不大。

此外,在先進製程方面,趙海軍強調,公司將保障生產連續性,繼續與供應商推進出口許可證的申請;也會考慮加強第一代、第二代FinFET多元平台開發的布建,並拓展平台的可靠性及競爭力。

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