晶瑞股份(300655.SZ)：順利購得一台ASML XT 1900 Gi型光刻機
格隆匯1月19日丨晶瑞股份(300655.SZ)公佈，公司於2020年9月28日召開了第二屆董事會第二十八會議，審議通過了《關於購買設備的議案》，為開展集成電路製造用高端光刻膠研發項目，擬通過Singtest Technology PTE. LTD.進口ASML光刻機設備。
自公司開展設備採購活動以來，受到投資者廣泛密切關注。經公司多方協商、積極運作，順利購得ASML XT 1900 Gi型光刻機一台。該設備於2021年1月19日運抵蘇州併成功搬入公司高端光刻膠研發實驗室。下一步，公司將積極組織相關資源，儘快完成設備的安裝調試工作。
目前高端集成電路材料的核心產業化技術仍掌握在國外企業手中，大部分市場份額仍被外企所佔據，不少集成電路用關鍵材料已經成為我國“卡脖子”的技術領域，在國際環境日益嚴峻的情況下，如不能成功實現該領域的國產化，未來將付出更大的代價。公司量產光刻膠近 30年，組建了國內領先的光刻膠研發團隊，具有豐富的光刻膠研發和生產經驗，先後承擔了國家“85”攻關、“863”重大專項、科技部創新基金等科技項目、承擔了國家02重大專項“i線光刻膠產品開發及產業化”項目，並順利通過國家02重大專項驗收。公司完成中試的KrF光刻膠已進入客户測試階段，達到0.15μm的分辨率。此次購買的ASML光刻機設備系公司集成電路製造用高端光刻膠研發項目的必要實驗設備，旨在研發出更高端的ArF光刻膠，若研發工作進展順利，將有助於公司將光刻膠產品序列實現到ArF光刻膠的跨越，並最終實現應用於12英寸芯片製造的戰略佈局。
公司採購的光刻機設備為ASML XT 1900 Gi型ArF浸入式光刻機，可用於研發最高分辨率達28nm的高端光刻膠。
此次公司採購的ASML光刻機設備的順利交付，可以保障公司集成電路製造用高端光刻膠研發項目關鍵設備的技術先進性，對加快產品研發項目進度有積極影響，有利於進一步提升公司光刻膠產品的核心競爭力，有助於落實公司發展戰略，提高公司抗風險能力和可持續發展能力。
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