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南大光電(300346.SZ):ArF光刻膠產品通過客户認證
格隆匯 12-17 17:52

格隆匯 12 月 17日丨南大光電(300346.SZ)公佈,公司控股子公司寧波南大光電材料有限公司(“寧波南大光電”)自主研發的ArF光刻膠產品近日成功通過客户的使用認證。

“ArF光刻膠產品開發和產業化”是寧波南大光電承接國家“02專項”的一個重點攻關項目。此次產品的認證通過,標誌着“ArF光刻膠產品開發和產業化”項目取得了關鍵性的突破,成為國內通過產品驗證的第一隻國產ArF光刻膠,為全面完成項目目標奠定了堅實的基礎。

認證評估報告顯示,“此次認證選擇客户50nm閃存產品中的控制柵進行驗證,寧波南大光電的ArF光刻膠產品測試各項性能滿足工藝規格要求,良率結果達標。”

ArF光刻膠材料是集成電路製造領域的重要關鍵材料,可以用於90nm-14nm甚至7nm技術節點的集成電路製造工藝。廣泛應用於高端芯片製造(如邏輯芯片、AI芯片、5G芯片、大容量存儲器和雲計算芯片等)。

ArF光刻膠的市場前景好於預期。隨着國內IC行業的快速發展,自主創新和國產化步伐的加快,以及先進製程工藝的應用,將大大拉動光刻膠的用量。

此次通過客户認證的產業化意義大。此次驗證使用的50nm閃存技術平台,在特徵尺寸上,線製程工藝可以滿足45nm-90nm光刻需求,孔製程工藝可滿足65nm-90nm光刻需求,該工藝平台的光刻膠在業界有代表性。

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