普達特科技(00650.HK)獲得一台半導體高温硫酸清洗設備的樣機訂單
格隆匯7月23日丨普達特科技(00650.HK)公吿,公司已從一個客户處獲得一台半導體高温硫酸清洗(高温SPM)設備的樣機訂單。該設備目前已處於組裝與測試階段,前期已通過客户的多項工藝性能測試與馬拉松測試,部分指標達到國際領先水平,顯著推進了國產高温SPM清洗設備打破海外壟斷的進程。該樣機訂單的收入暫未確認。於本公吿日期,該客户及其最終實益擁有人為獨立於公司及其關連人士的第三方。
該設備採用高温SPM清洗工藝,可覆蓋12英寸晶圓關鍵製程的PR-strip、Post-CMP、NiPt remove等多種應用,是業界公認的高難度濕法工藝,市場目前由海外設備供應商壟斷。公司研發的該設備,具備國內領先、國際一流的高温控制能力,可覆蓋至190°C的高温SPM工藝,經馬拉松驗證,終端工藝腔體高温硫酸温控範圍±2°C,優於主要海外供應商的±5°C。該設備通過NiPt remove工藝demo測試,在高挑戰性的工況下取得了與國際基準產品對齊的測試結果。該設備在設計方面,採用了化學供液系統與工藝腔室集成化的設計,保證了更大的工藝兼容性與靈活的應用配置,可為客户提供更具綜合競爭力與性價比的解決方案。
下一階段,公司將致力於完成該設備的交付與驗證,並擴大客户在高端應用領域對公司的設備的採用,充分發揮公司技術團隊在半導體濕法技術方面的優勢,解決行業痛點,提高客户效率,繼續推動高端半導體設備國產化。
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