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新時達(002527.SZ):產品可實現全面國產設備替代,已批量應用於生產模擬芯片、功率芯片、傳感器芯片、LED 芯片等前道晶圓廠(FAB)

格隆匯5月14日丨新時達(002527.SZ)在投資者關係表示,衆爲興的半導體機器人是控制、驅動、軟硬件一體的全自主可控半導體機器人。經過三年的持續投入,公司推出國內領先的半導體晶圓傳輸機器人產品矩陣,涵蓋分別應用於大氣環境和真空環境的 8 大系列數十款不同型號的產品,能夠覆蓋熱處理、清洗、刻蝕、薄膜、黃光、減薄、鍵合等半導體前道和後道工藝製程應用,產品可實現全面國產設備替代,已批量應用於生產模擬芯片、功率芯片、傳感器芯片、LED 芯片等前道晶圓廠(FAB)。

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