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南大光電(300346.SZ):公司電子特氣產品中,高純磷烷、砷烷是半導體生產的關鍵材料之一
格隆匯 05-12 15:15

格隆匯5月12日丨有投資者在投資者互動平台向南大光電(300346.SZ)提問,“請問貴司用於貴司的電子特氣最高能用於多少nm的芯片製造?”

南大光電回覆稱,公司電子特氣產品中,高純磷烷、砷烷主要用於集成電路製造的摻雜工藝和LED的化學氣相沉積工藝,是半導體生產的關鍵材料之一;三氟化氮是集成電路製造領域優良的等離子蝕刻和清洗材料,可用於先進製程芯片製造。

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