華海清科(688120.SH):自主研發的清洗設備已批量用於公司晶圓再生生產,預計2023年推向相關細分市場
格隆匯5月8日丨華海清科(688120.SH)披露投資者關係活動記錄表,問答環節中,就“公司其他半導體設備有何進展?”,公司回覆稱,公司自主研發的清洗設備已批量用於公司晶圓再生生產,預計2023年推向相關細分市場;金屬薄膜厚度測量設備已實現小批量出貨,在客户端表現出色,已在高端製程完成部分工藝驗證,非金屬的膜厚量測產品也在研發中;用於濕法工藝設備中研磨液、清洗液等化學品供應的HSDS/HCDS供液系統設備已獲得批量採購,主要分為直接銷售及作為CMP設備附屬設備配套銷售,目前以配套銷售為主。
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