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中密控股(300470.SZ):取得1項專利證書 為密封裝置、密封控制系統及硅烷壓縮機
格隆匯 06-22 16:41

格隆匯6月22日丨中密控股(300470.SZ)公佈,公司於近日收到由中華人民共和國國家知識產權局頒發的一項專利證書,獲得形式為原始取得,所涉及技術與公司主要技術相關,名稱為密封裝置、密封控制系統及硅烷壓縮機。

實用新型專利《密封裝置、密封控制系統及硅烷壓縮機》涉及一種密封裝置和密封控制系統,主要應用於製備高純度硅烷的含硅半導體生產技術領域。該密封裝置採用獨特的四級密封串聯佈置的型式,系統流程上配置了氣體過濾、氣體調壓、泄漏物監測及硅烷泄漏物回收等單元及完備的自動控制手段。該技術可保證機組內部極具自燃性的硅烷氣體不會泄漏至大氣中、機組外部非硅烷氣體不會進入壓縮機內部、微量硅烷泄漏氣體可回收等,提高了密封裝置運行的安全性和穩定性。該技術已應用於公司部分產品上。

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